3-D Surface Metrology

White-light interferometry is among the proven optical measurement techniques for recording 3-D topographies with depth resolution in the lower nanometre range. Because the measurement points are acquired and processed in parallel, the height information can be gathered over a large area in a very short time. Typical applications in research and in quality management are the characterisation of surfaces with different roughness values (wafer structures, mirrors, glass, metals), the determination of step heights and the precise measurement of curved surfaces, such as microlenses. The product family smartWLI offers innovative solutions utilising this measurement principle. The control and analysis of the entire measurement process is done using the proven smartWLI software. The efficient, robust and highly accurate analysis algorithms are the result of extensive research and experience in this area.